Features
- Ultra-stable patented IsoSensor™ flow measurement sensor
- Ultra-high purity flow path
- Remote electronics come standard with two analog electrical connectors
- Digital measurement and control architecture
Benefits
- High stability sensor delivers superior uptime, reducing maintenance and lowering total cost of ownership
- All-metal wetted flow path ensures integrity and purity of gas/vapor
- Included 20 pin card edge and a 9 or 15 pin “D” connector enables standardization and reduces inventory
- Enhanced accuracy and process control
Applications
- Optical fiber manufacturing - MCVD
- Silicon semiconductor device fabrication processes
| 9861 | |
| Flow Range (Full Scale Capacity) | 3 sccm - 10 slm (N2 equivalent) |
| Surface Finish | 4µ inch Ra |
| Accuracy |
±1% SP @ 35 - 100% FS ±0.35% FS @ <35% FS |
| Repeatability | < ±0.15% FS |
| Response Time |
≤ 1 sec to within 2% of SP (per SEMI E17-91)
|
| Diagnostic Capability | |
| Analog Communication |
0-5 Vdc |
| Digital Communication |
RS485L Protocol |
Hãy liên hệ với chúng tôi để được tư vấn và hỗ trợ - Brooks Instrument Vietnam - TMP Vietnam
Lưu lượng kế Flow meter 9861-Brooks Instrument Vietnam-TMP Vietnam
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